Integrated Clean Room for Micro and Nano-fabrication of the National Microelectronic Centre of the CSIC (SBCNM)
http://www.imb-cnm.csic.es/index.php/en/clean-room
Core Data
Identification
Hosting Legal Entity
|
Spanish National Research Council
|
|
|
Address:
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Spain
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Location
Cerdanyola del Vallès, Carrer Til·lers s/n. Campus UAB, Barcelona, PO: 08193 (Spain)
Structure
Type Of RI
Single-sited
Coordinating Country
Spain
Status
Status
Current Status:
Being upgraded
since 2017
Timeline
Being upgraded
since 2017
Operational
since 1991
Under construction
since 1988
to 1990
Design/planning
since 1985
to 1987
Scientific Description
Mission and objectives
Fully operative Clean Room for the development and fabrication of Micro and Nanointegrated devices. The Institute of Microelectronics of Barcelona (IMB-CNM) belongs to the Spanish Research Council (CSIC) and is the largest public micro/nano electronics research and development centre in Spain. Embedded administratively in IMB-CNM, although having a separate and well defined structure and operating policies, there is the Singular Facility called “ICTS Sala Blanca integrada de Micro y Nanofabricación” (ICTS- Integrated Micro and Nanofabrication Clean Room). Micro and Nano Technologies (MNT) and related Microsystems and MEMS devices are horizontal and disruptive ICT technologies with clear impact in all fields of research and social and economic activity as well stated in the European Commission Framework Programme. Clean Rooms like the CNM-IMB ICTS are key infrastructures for carrying out fundamental applied and industrial research in those high tech fields in the south of Europe. This RI is an ICTS (Unique Scientific and Technological Infrastructure), included in the Spanish National Roadmap for RIs.
RI Keywords
Lab-on-a-chip, Organ-on-a-chip, Actuators, Microfluidics sensors, PowerMEMS, Energy harvesting, Micro sensors and actuators, Memristors, Microtechnology, Micro- and nanoelectronics, Micro-nanoelectronics, Sensors, Graphene, Smart systems, Micro-nano fabrication, Nanotechnology, ISFETs, Neuromorphic devices, Radiation Detectors, Microsystems, MEMS, Biosensor technologies, BioMEMS, Clean-room, Printed electronics, Power systems, Radiation monitoring, Actuators sensor technology, Radiation resistance, Power electronics
Classifications
RI Category
Micro- and Nanotechnology facilities
Scientific Domain
Physics, Astronomy, Astrophysics and Mathematics
Information Science and Technology
Engineering and Energy
Information Science and Technology
Engineering and Energy
ESFRI Domain
Physical Sciences and Engineering
Services
Reverse engineering
Yield and reliability studies and failure analysis via reverse engineering.
Training to industry and academia
Technology and device training, hands-on for academia and industry.
Sensors and integrated circuit design
Design service for any microelectronics technology open for prototyping and fabrication.
Electrical characterisation
Device, subsystems and systems parametric and functional characterisation.
Modelling
Finite element modelling and device and technology simulation.
Device packaging and system integration
Packaging, and hybrid integration.
Micro and nano devices fabrication
Equipment
Electrical characterisation probe stations
Wafer bonding
Metals evaporation
LPCVDs, PECVVD
Wet etching and cleaning benches
Direct laser writing
AF, Acoustic microscopes
Steppers
SAW dicers
Thermal characterisation systems
Metal sputtering
Dry etching, RIE, DRIE
CMP
Nanoimprint
Contact mask aligners
Wire bonding
FIB
Flip chip packaging
Ion implanters
AFM
e-beam
Thermal furnaces
Additional Data
Access
Access Type
Physical
Access Mode
Wide
Access Webpage
https://www.micronanofabs.org/
Users
Number of Users
| Number | Year |
|---|---|
| 351 | 2018 |
| 338 | 2017 |
| 385 | 2016 |
| 354 | 2015 |
| 338 | 2014 |
| 438 | 2013 |
Users Definition
Teams of individual researchers