Center of Semiconductor Technology (PTC)
http://www.tmi.vu.lt/en/open-access
Core Data
Identification
Hosting Legal Entity
Vilnius University
Vilnius University
Location
Sauletekio al. 15, Vilnius, PO: LT-10222 (Lithuania)
Structure
Type Of RI
Single-sited
Coordinating Country
Lithuania
Status
Status
Current Status:
Under construction since 2012
Timeline
Operational since 2015
Scientific Description
Mission and objectives
The Center of Semiconductor Technology will be a follow-up of the recent joint agreement of the Lithuanian researchers working in different institutions in the field of semiconductor science and technology to establish a semiconductor technology center in the framework of the major national program for the Sauletekis Valley. This center will meet the needs of these researchers for facilities necessary to purposefully fabricate samples for their research and to develop device prototypes for specific applications. This infrastructure would be useful for high-tech companies in Lithuania and, increasingly in time, abroad for developing their products, but it is mainly directed to facilitate implementation of scientific ideas to products by creating a technological base for researchers to develop their prospective ideas into a functional device prototypes serving as a base for establishment of spin-offs to produce commercial products.

RI Keywords
Nanotechnology, Optoelectronic devices, Organic electronics, Semiconductor technology
Classifications
RI Category
Micro- and Nanotechnology facilities
Scientific Domain
Physics, Astronomy, Astrophysics and Mathematics
Engineering and Energy
Chemistry and Material Sciences
ESFRI Domain
Physical Sciences and Engineering
Services
Semiconductor epitaxy

Deposition of semiconductor epilayers and heterostructures by Molecular Beam Epitaxy (MBE), Metal-Organic Chemical Vapor Deposition (MOCVD), liquid epitaxy, and Chemical Vapor Deposition (CVD).

Fabrication of organic semiconductor structures

Organic semiconductor layer evaporation, casting, metallization, sealing, user support and training.

Materials characterization by X-ray and optical techniques

Study of materials structure using XRD, XPS, and optical microscopy.

Semiconductor processing

Access to equipment for photolithography, metal and dielectric layer deposition, thermal annealing, dry and chemical etching, bonding, and mounting; user support and training.

Equipment
Equipment for deposition of semiconductor epilayers and heterostructures

Three Molecular Beam Epitaxy (MBE) machines. Metal-Organic Chemical Vapor Deposition (MOCVD) reactor. Liquid epitaxy equipment. Two Chemical Vapor Deposition (CVD) reactors.

Equipment for fabrication of organic semiconductor structures

Equipment for the organic semiconductor layer evaporation, casting, metallization, sealing, glove-boxes, etc.

Equipment for characterization of material structure

X-ray characterization devices (XRD, XPS), microscopy devices.

Equipment for semiconductor processing

Equipment for photolithography, metal and dielectric layer deposition, thermal annealing, dry and chemical etching, bonding, and mounting.