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Integrated Clean Room for Micro and Nano-fabrication of the National Microelectronic Centre of the CSIC (SBCNM)
Identification
Hosting Legal Entity
Spanish National Research Council
Address:
Spain
Location
Cerdanyola del Vallès, Carrer Til·lers s/n. Campus UAB, Barcelona, PO: 08193 (Spain)
Structure
Type Of RI
Single-sited
Coordinating Country
Spain
Status
Status
Current Status:
Being upgraded since 2017
Timeline
Being upgraded since 2017
Operational since 1991
Under construction since 1988 to 1990
Design/planning since 1985 to 1987
Scientific Description
Fully operative Clean Room for the development and fabrication of Micro and Nanointegrated devices. The Institute of Microelectronics of Barcelona (IMB-CNM) belongs to the Spanish Research Council (CSIC) and is the largest public micro/nano electronics research and development centre in Spain. Embedded administratively in IMB-CNM, although having a separate and well defined structure and operating policies, there is the Singular Facility called “ICTS Sala Blanca integrada de Micro y Nanofabricación” (ICTS- Integrated Micro and Nanofabrication Clean Room). Micro and Nano Technologies (MNT) and related Microsystems and MEMS devices are horizontal and disruptive ICT technologies with clear impact in all fields of research and social and economic activity as well stated in the European Commission Framework Programme. Clean Rooms like the CNM-IMB ICTS are key infrastructures for carrying out fundamental applied and industrial research in those high tech fields in the south of Europe. This RI is an ICTS (Unique Scientific and Technological Infrastructure), included in the Spanish National Roadmap for RIs.

RI Keywords
Graphene, Micro- and nanoelectronics, Power electronics, Microsystems, Neuromorphic devices, BioMEMS, Clean-room, Power systems, Nanotechnology, Radiation Detectors, Microtechnology, Biosensor technologies, Smart systems, Energy harvesting, Sensors, Organ-on-a-chip, Printed electronics, Actuators, Actuators sensor technology, Memristors, Radiation monitoring, PowerMEMS, ISFETs, Microfluidics sensors, Micro sensors and actuators, Micro-nano fabrication, Radiation resistance, MEMS, Lab-on-a-chip, Micro-nanoelectronics
Classifications
RI Category
Micro- and Nanotechnology facilities
Scientific Domain
Engineering and Energy
Physics, Astronomy, Astrophysics and Mathematics
Information Science and Technology
ESFRI Domain
Physical Sciences and Engineering
Services
Modelling

Finite element modelling and device and technology simulation.

Sensors and integrated circuit design

Design service for any microelectronics technology open for prototyping and fabrication.

Reverse engineering

Yield and reliability studies and failure analysis via reverse engineering.

Device packaging and system integration

Packaging, and hybrid integration.

Training to industry and academia

Technology and device training, hands-on for academia and industry.

Electrical characterisation

Device, subsystems and systems parametric and functional characterisation.

Micro and nano devices fabrication
Equipment
Thermal furnaces
Thermal characterisation systems
CMP
AF, Acoustic microscopes
Metal sputtering
SAW dicers
AFM
Ion implanters
e-beam
Metals evaporation
FIB
LPCVDs, PECVVD
Nanoimprint
Electrical characterisation probe stations
Wire bonding
Wet etching and cleaning benches
Steppers
Dry etching, RIE, DRIE
Direct laser writing
Wafer bonding
Flip chip packaging
Contact mask aligners
Access
Access Type
Physical
Access Mode
Wide
Users
Number of Users
Number Year
351 2018
338 2017
385 2016
354 2015
338 2014
438 2013
Users Definition
Teams of individual researchers
Date of last update: 17/05/2019
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