National Information Infrastructure Development Institute
Electrical and Optical Engineering Facilities
Mechanical Engineering Facilities
Engineering and Energy
Physics, Astronomy, Astrophysics and Mathematics
Information Science and Technology
Open access to Microtechnology-MEMS-Microfluidics. Researchers , under- and postgraduated students are welcomed. National and international research and development projects are hosted. Applications have to be sent to firstname.lastname@example.org e-mail address. The detailes of the access and the cost of the usage of equipments are listed at the web-pages of the laboratory.
High density plasma etching system for 3D etching of Si.
Structural and functional characterizations of microdevices.
Complete microtechnology line including photolithography, high temperature treatments, thin film depositions (e-beam evaporation, sputtering, LPCVD, ALD), ion implantation, wet chemical treatments, dicing and packaging.