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Micro Technology Research Laboratory (MTA TTK MFA - MEMS Laboratory)
Identification
Hosting Legal Entity
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National Information Infrastructure Development Institute
|
Location
Konkoly Thege Miklós út 29-33, Budapest, PO: 1121 (Hungary)
Structure
Type Of RI
Single-sited
Coordinating Country
Hungary
Status
Status
Current Status:
Operational
since 1971
Scientific Description
The clean room facility, the Laboratory of Microtechnology of MTA TTK MFA consists of a CMOS Si technology line, mask shop, a bulk micromachining design and fabrication line, a laboratory of microfluidics and a semiconductor photovoltaic development facility. The mission of the Laboratory of Microtechnology is the research and development of sensor principles, devices, actuators, functional micro and nanostructures by integrated the knowledge bases of microtechnology, biology, physics, chemistry, and other disciplines.
RI Keywords
Nanotechnology, Photovoltaic devices, Actuators sensor technology, Microtechnology, Solar cell technology, Semiconductor technology, Microfluidics sensors, Microelectronics, Clean-room
Classifications
RI Category
Micro- and Nanotechnology facilities
Electrical and Optical Engineering Facilities
Mechanical Engineering Facilities
Electrical and Optical Engineering Facilities
Mechanical Engineering Facilities
Scientific Domain
Engineering and Energy
Information Science and Technology
Physics, Astronomy, Astrophysics and Mathematics
Chemistry and Material Sciences
Information Science and Technology
Physics, Astronomy, Astrophysics and Mathematics
Chemistry and Material Sciences
Services
Materials science research infrastructure research laboratory testing methods and equipments experimental development measurements consulting education Others - integration of micro and nanosystems, device preparation
Open access to Microtechnology-MEMS-Microfluidics. Researchers , under- and postgraduated students are welcomed. National and international research and development projects are hosted. Applications have to be sent to dragon@ttk.mta.hu e-mail address. The detailes of the access and the cost of the usage of equipments are listed at the web-pages of the laboratory.
Equipment
- Si 3D Micromatchining
High density plasma etching system for 3D etching of Si.
- Characterization tools
Structural and functional characterizations of microdevices.
- Silicon CMOS Technology line
Complete microtechnology line including photolithography, high temperature treatments, thin film depositions (e-beam evaporation, sputtering, LPCVD, ALD), ion implantation, wet chemical treatments, dicing and packaging.
Date of last update: 08/03/2017
