National Information Infrastructure Development Institute
Mechanical Engineering Facilities
Micro- and Nanotechnology facilities
Engineering and Energy
Information Science and Technology
Chemistry and Material Sciences
Open access to Microtechnology-MEMS-Microfluidics. Researchers , under- and postgraduated students are welcomed. National and international research and development projects are hosted. Applications have to be sent to email@example.com e-mail address. The detailes of the access and the cost of the usage of equipments are listed at the web-pages of the laboratory.
High density plasma etching system for 3D etching of Si.
Complete microtechnology line including photolithography, high temperature treatments, thin film depositions (e-beam evaporation, sputtering, LPCVD, ALD), ion implantation, wet chemical treatments, dicing and packaging.
Structural and functional characterizations of microdevices.