such as training sessions, an introduction to nanofabrication and use of the facilities, including expert demonstrations. These sessions are a prerequisite for appreciating the functionality of the nanotechnology equipment.
The expert technologies of the NanoLabNL-locations are: Kavli NanoLab Delft: Particle beam processing; large area e-beam lithography; advanced reactive plasma etching; superconducting film growth; bionanoimaging and super resolution techniques. TNO NanoLab Delft: Contamination analysis and plasma cleaning; nano-lithography and beaminduced deposition; ultra-high precision metrology stage platform; helium-ionbeam microscopy. NanoLab@TU/e: Fabrication of III-V semiconductor and photonic devices; deposition of organic, magnetic, and electronic nanostructured materials. Zernike NanoLab Groningen: Soft Molecular Landing deposition. MESA+ NanoLab Twente: Nano-imprint lithography; thin film growth; complex materials; hybrid technologies; wide spectrum of analysis. Philips Innovation Services: Deposition, lithography, etching, measurement, substrates of any shape up to 200 mm; SCIL (Substrate conformal imprint lithography), e-beam lithography, double-sided processing lithography, Piezo MEMS, optical coatings, circuits on flexible substrates; device integration, large area microstructuring by laser ablation, microfluidics, bio-cartridges, lab-on-a-chip, LEDs and OLEDs, thin-film encapsulation; thin film characterization, trace analysis and contamination control, RF and DC device characterization.
The vouchers, worth €7,500 each, entitle holders to 50 - 75 hours of independent use of the facilities (including training) and/or related advice. The vouchers are intended for industrial parties such as start-ups and young companies that are building up a business based on research results. These vouchers allow companies to acquaint themselves with our research facilities in an accessible way, and are a way for us to stimulate commercial activity in this field.