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Hosting Legal Entity
Stieltjesweg 1, TNO NanoLab Delft, Delft, PO: 2628 CK (Netherlands)
Type Of RI
Coordinating Country
Current Status:
Operational since 2004
Scientific Description
NanoLabNL is the Dutch national facility for nanotechnology research. Its aim is to build up, maintain and provide a coherent and accessible infrastructure for nanotechnology research and innovation in the Netherlands. NanoLabNL offers the use of its facilities and expertise to universities, research institutes, start-ups and industry at 4 locations in the Netherlands (Delft, Eindhoven, Groningen and Twente).The decision to make use of only a limited number of research laboratories and to make them accessible to all researchers, both public as well as private, has proven extremely effective. NanoLabNL creates, maintains and provides access to a coherent, high-level, state-of-the-art infrastructure for nanotechnology research and innovation in the Netherlands. Each of the NanoLabNL locations offers a range of basic and expert techniques.

RI Keywords
Nanotechnology, Open-access infrastructure
RI Category
Micro- and Nanotechnology facilities
Scientific Domain
Chemistry and Material Sciences
ESFRI Domain
Physical Sciences and Engineering
On-site tutorials

such as training sessions, an introduction to nanofabrication and use of the facilities, including expert demonstrations. These sessions are a prerequisite for appreciating the functionality of the nanotechnology equipment.

Access to a range of basic and expert technologies

The expert technologies of the NanoLabNL-locations are: Kavli NanoLab Delft: Particle beam processing; large area e-beam lithography; advanced reactive plasma etching; superconducting film growth; bionanoimaging and super resolution techniques. TNO NanoLab Delft: Contamination analysis and plasma cleaning; nano-lithography and beaminduced deposition; ultra-high precision metrology stage platform; helium-ionbeam microscopy. NanoLab@TU/e: Fabrication of III-V semiconductor and photonic devices; deposition of organic, magnetic, and electronic nanostructured materials. Zernike NanoLab Groningen: Soft Molecular Landing deposition. MESA+ NanoLab Twente: Nano-imprint lithography; thin film growth; complex materials; hybrid technologies; wide spectrum of analysis. Philips Innovation Services: Deposition, lithography, etching, measurement, substrates of any shape up to 200 mm; SCIL (Substrate conformal imprint lithography), e-beam lithography, double-sided processing lithography, Piezo MEMS, optical coatings, circuits on flexible substrates; device integration, large area microstructuring by laser ablation, microfluidics, bio-cartridges, lab-on-a-chip, LEDs and OLEDs, thin-film encapsulation; thin film characterization, trace analysis and contamination control, RF and DC device characterization.

Voucher rounds for new industrial users

The vouchers, worth €7,500 each, entitle holders to 50 - 75 hours of independent use of the facilities (including training) and/or related advice. The vouchers are intended for industrial parties such as start-ups and young companies that are building up a business based on research results. These vouchers allow companies to acquaint themselves with our research facilities in an accessible way, and are a way for us to stimulate commercial activity in this field.

Date of last update: 04/09/2018
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