Chalmers University of Technology
Electrical and Optical Engineering Facilities
Materials Synthesis or Testing Facilities
Extreme Conditions Facilities
Micro- and Nanotechnology facilities
Engineering and Energy
Physics, Astronomy, Astrophysics and Mathematics
Chemistry and Material Sciences
Biological and Medical Sciences
Information Science and Technology
Open access to more than 600 tools in three cleanrooms, user support, user training, education and process service.
Electron beam lithography (high resolution), thin film deposition, several etching methods, ion implantation, thermal processing, MBE, MOCVD, die mounting, back-end assembly, a large number of characterization techniques (SEM, FIB, TEM, XPS, ...). Processes established for e.g. silicon technologies, III-V and photonic devices and quantum devices. See: http://myfab.se and subpages therein for all tools and their descriptions.