University of Tartu
Micro- and Nanotechnology facilities
Materials Synthesis or Testing Facilities
Physics, Astronomy, Astrophysics and Mathematics
Chemistry and Material Sciences
HR-TEM, MAT-SEM and ToF-SIMS facilities are supported by a full-time machine operator and include sample preparation and help in interpreting the measurement results.
High Resolution Transmission Electron Microscope (HR-TEM) provides nanoscale imaging and element analysis of specially prepared material samples with sub-nanometre resolution for investigating atom level properties of materials.
The Time of Flight Secondary Ion Mass Spectrometer (ToF-SIMS) is used for measuring the chemical element composition of a material with high spatial accuracy. ToF-SIMS facility provides a service for characterizing materials’ chemical composition both at high lateral accuracy (0.5 – 1.0 microns) and mass selectivity (M/dM>11000). The set-up also provides an Ion gun for accurate materials cutting and edging in situ for depth profiling.
The High Resolution Scanning Electron Microscope (MAT-SEM) is equipped for materials growth and characterization set-up. An apparatus for high resolution imaging and characterization of materials and objects with scattered electrons and high accuracy mass measurements. The MAT-SEM facility provides a complex service of growing thin film materials with laser ablation deice NANO-PLD-1000 and measuring the mass and structural properties with crystal resonance mass detector and high resolution (down to 0.6 nm) scanning electron microscope.