University of Tartu
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Micro- and Nanotechnology facilities
Analytical Facilities
Electrical and Optical Engineering Facilities
Engineering and Energy
Physics, Astronomy, Astrophysics and Mathematics
HR-TEM, MAT-SEM and ToF-SIMS facilities are supported by a full-time machine operator and include sample preparation and help in interpreting the measurement results.
The High Resolution Scanning Electron Microscope (MAT-SEM) is equipped for materials growth and characterization set-up. An apparatus for high resolution imaging and characterization of materials and objects with scattered electrons and high accuracy mass measurements. The MAT-SEM facility provides a complex service of growing thin film materials with laser ablation deice NANO-PLD-1000 and measuring the mass and structural properties with crystal resonance mass detector and high resolution (down to 0.6 nm) scanning electron microscope.
The Time of Flight Secondary Ion Mass Spectrometer (ToF-SIMS) is used for measuring the chemical element composition of a material with high spatial accuracy. ToF-SIMS facility provides a service for characterizing materials’ chemical composition both at high lateral accuracy (0.5 – 1.0 microns) and mass selectivity (M/dM>11000). The set-up also provides an Ion gun for accurate materials cutting and edging in situ for depth profiling.
High Resolution Transmission Electron Microscope (HR-TEM) provides nanoscale imaging and element analysis of specially prepared material samples with sub-nanometre resolution for investigating atom level properties of materials.