You are here: Home / Infrastructures / Res. Infrastructure
Karlsruhe Nano Micro Facility (KNMF)
Hosting Legal Entity
Self-standing RI
Legal Status
Research organisation
Hermann von Helmholtz Platz 1, FIZ Karlsruhe, Eggenstein-Leopoldshafen (Karlsruhe), PO: 76344 (Germany)
Type Of RI
Coordinating Country
Current Status:
Operational since 2009
Scientific Description
KNMF is a high-tech platform for structuring and characterizing a multitude of functional materials at the micro- and nanoscale.The Karlsruhe Nano Micro Facility (KNMF) offers access to a uniquely complete set of fabrication and characterization technologies. External users from academia and industry, either national or international, can apply for open and – if the results are published – free access. Annual deadlines for the submission of proposals are January 15 and June 15. Applications for urgent and commercial projects can be submitted at any time (proposal submission External Link). The highly qualified KNMF staff will guide users through the relevant processes and techniques to address their processing goals and characterization needs. KNMF encourages the early discussion of planned projects and scientific goals and is open for long-term collaborations.

RI Keywords
Nanocharacterization, Spectroscopy and microscopy, Micro- and nanostructuring, Correlative Characterisation, Synchrotron characterisation
RI Category
Micro- and Nanotechnology facilities
Scientific Domain
Chemistry and Material Sciences
Physics, Astronomy, Astrophysics and Mathematics
Engineering and Energy
Access to KNMF Installations

KNMF unifies more than 24 technology clusters and 39 scientists managing three laboratories. KNMF Laboratory for Micro- and Nanostructuring combines an impressive set of constructive bottom up and ablative top down structuring and replication technologies. KNMF Laboratory for Microscopy and Spectroscopy stimulates the current and future trends for high energy microscopy and spectroscopy. KNMF Laboratory for Synchrotron Characterisation offers novel possiblites for high energy characterisation in the nanometre wavelength range. Access to KNMF installations requires the submission of proposals via the online proposal submission system.

KNMF Laboratory for Microscopy and Spectroscopy

Atomic force microscopy Auger electron spectroscopy Bulk and trace analysis of nanomaterials Laser ablation ICPMS Single Crystal X-ray Diffraction Thin film characterisation Transmission electron microscopy X-ray photoelectron spectroscopy Dual beam workstation FIB/FESEM (planned for 2014) Atom probe tomography (planned for 2014) Helium ion microscope (planned for 2013) Spectroscopy cluster for chemical nanosynthesis (planned for 2014) Powder diffractometry (planned for 2014).

KNMF Laboratory for Micro- and Nanostructuring

Electron beam lithography, Deep X-ray lithography, Laser Lithography System, Focused ion beam, Laser material processing, Hot embossing, Injection moulding, Dip-pen nanolithography, Thin film technologies, Dry etching cluster, Atomic Layer Deposition (planned for 2014), Nanoreplication (planned for 2014), Next generation X-ray lithography (planned for 2014).

Access Type
Access Webpage
Number of Users
Number Year
155 2018
Users Definition
User Demographics
National Users - 44.0% in 2018
European Users - 28.0% in 2018
Extra-European Users - 28.0% in 2018
Type of Users
Academic - 60.0%
Public research organisations - 22.0%
Industry/private companies - 18.0%
Date of last update: 27/03/2019
Printable version