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DTU Danchip National Centre for Micro- and Nanofabrication, Technical University of Denmark (DTU DANCHIP)
Hosting Legal Entity
Technical University of Denmark
Oersteds Plads Building 347, Kgs. Lyngby, PO: 2800, Sjælland (Denmark)
Type Of RI
Coordinating Country
Current Status:
Operational since 1993
Scientific Description
DTU DANCHIP is an open access facility for reserach, development and small-scale production within micro- and nano-fabrication. We are a national centre located at and fully owned by the Technical University of Denmark (DTU). We operate and maintain open access state-of-the-art processing equipment and cleanroom facilities to enable optimum processing within broad technology areas. We facilitate innovation in an environment where researchers, small and medium sized enterprises as well as large established firms can directly access our state of the art fabrication equipment. We provide a comprenhensive and expanding selection of state-of-the-art process equipment for lithography, etching, thermal processing, thin film deposition, wafer cleaning, packaging and characterisation, which are professionally maintained by our team of technicians and process engineers. We conduct research and insource development and small scale production projects thereby opening a pathway to customized micro- and nanosystems without large investments into equipment and facilities. Our 250 registered users work in the areas of education, research, development, prototyping, and small scale production. Our staff of more than 40 employees is dedicated to quality and service.

RI Keywords
Nanostructuring, MEMS fabrication, DUV lithography, Nanofabrication, Microfabrication, E-beam lithography, Semiconductor processing technology
RI Category
Micro- and Nanotechnology facilities
Scientific Domain
Information Science and Technology
Engineering and Energy
Physics, Astronomy, Astrophysics and Mathematics
Chemistry and Material Sciences
Research projects, development projects, access to micro- and nanofabrication facility

DTU Danchip is open to all forms of collaboration, from basic cleanroom access to commercial as well as publicly funded research projects. In-sourcing of development projects, small scale production. DTU Danchip is ISO 9001 certified.

State of the art top-down micro-and nanofabrication tools

JEOL 9500 Ebeam lithography tool, DUV stepper lithography, silicon and III-V materials processing, ALD, PECVD, LPCVD, SEM, XPS, SIMS, AFM.

Nordic Nanolab Network
Date of last update: 09/02/2014
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