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Micronova Centre for Micro and Nanotechnology (Micronova)
Hosting Legal Entity
Aalto University
VTT Technical Research Centre of Finland
Tietotie 3 (Otaniemi), Espoo, PO: 02150 (Finland)
Type Of RI
Coordinating Country
Scientific Description
Micronova is Finland's National Research Infrastructure for micro- and nanotechnology, jointly run by VTT Technical Research Centre of Finland and Aalto University. Our mission is to develop innovative, enabling technologies, and to apply these in practical micro- and nanosystems.Micronova's expertise covers the entire micro-nano innovation chain, from basic device physics and materials research to the development of new fabrication techniques and device prototypes, and even small scale manufacturing. One of our key strengths is close collaboration with industry. Furthermore, teaching and researcher training form an important part of Micronova's activities. Applications developed at Micronova include microelectromechanical systems (MEMS), optical and wireless sensors, millimeter-wave devices, photonics systems, biosensors, microfluidics, nanoelectronic and quantum devices, radiation detectors and instruments for space technology.Located on the Otaniemi Technology Campus 10km west of Helsinki city center, Micronova brings together 350 professionals from the parent organisations as well as industry. Micronova is also open to researchers from outside the center. Our modern facilities include 2600 m2 of cleanrooms and processing lines for silicon CMOS, MEMS, III-V optoelectronics and thin film devices.

RI Keywords
Nanotechnology, Microelectronics
RI Category
Safety Handling facilities
Micro- and Nanotechnology facilities
Pilot Plants for Process Testing
Scientific Domain
Chemistry and Material Sciences
ESFRI Domain
Physical Sciences and Engineering
Cleanroom Space
Access to Nanofab’s processing and Measurement Equipment
Cleanroom Training and Safety Training
Small-scale Processing and Measurements
Nordic Nanolab Network
Date of last update: 14/06/2018
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